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MicroTrak 101 Gas Mass Meters & Controllers

MicroTrak 101 Ultra Low Flow Meter by SierraUltra Low-Flow Meter, High Performance Digital Gas Mass Flow Meters & Controllers

The MicroTrak™ 101 from Sierra Instruments measures and controls micro mass flows of gas (previously thought to be too low for a reliable reading).

Sierra specifically designed the MicroTrak™ for flow ranges under 4 sccm (smlm) with a minimum controllable mass flow rate of 0.08 sccm (smlm). The Model 101 is a specialised and highly engineered instrument for those who need accurate and reliable micro mass flow control of clean gases including corrosives and toxics.

MicroTrak™ is based on Sierra’s award-winning family of digital instruments. As a result, ease of operation, field configuration, multi-gas capability and application flexibility are standard features.

MicroTrak's NIST traceable accuracy is backed by Ssierra's 10-point, primary standard calibration over the entire flow range. The low pressure flow meter has a strong and flexible control valve with accessible PID valve tuning to assure best speed and reliability. Custom valve orifice sizing yields full-range stability.


  • Measure and control flow rates down to 0.1 sccm (smlm)
  • Increase efficiency with true, digital high-performance
  • Navigate easily with large multifunction display interface
  • Save time by making adjustments in the field
  • Configure up to 10 gasses with one instrument 

Industries: General Research / Analytical / Life Sciences & Health / Biopharmaceutical / Life Science / Medical Devices 


Benefits of Sierra's MicroTrak™

  • Ideal for OEM, industry and research
  • Full-scale flow ranges under 4sccm (smlm)
  • Proprietary valve orifice design for smooth control at ultra-low flows
  • User-friendly pilot module display interface is front-mounted, hand-held or remote mounted
  • Field adjustment with multifunction pilot module display interface. Change the following:
  • Measured gas
  • Flow rate
  • Engineering units
  • Set zero, span and full scale for each gas independently
  • Primary Standard Calibration & NIST traceability
  • 10 pre-programmed gases come standard; substitute up to 9 more
  • Proprietary frictionless-hovering direct-acting control/shut-off valve
  • Precision digital PID valve control; no valve tuning or adjustment
  • Free user software
  • Control functions also available from PC via RS-232
  • Source code for RS-232 communication provided
  • Compod™ upgrade to run processes without expense of DCS or PLC system
  • Enhanced networking capability, including two digital relays, totalisation, inputs, and display 

Applications suitable for use

  • Precision MEasurement & Control
  • Gas Mixing & Blending
  • Ultra Low Flow Control
  • Artificial Atmospheres
  • Research  

Some of the MicroTrak 101 Specifications

  • All clean gases including toxics and corrosives
  • High accuracy: +/- 0.5% of of full scale available
  • Accuracy: +/- 1% of full scale
  • Repeatability: +/- 0.2% of full scale
  • Flow ranges from 0 to 4 sccm (smlm)
  • Higher and lower flow ranges available
  • Pressure up to 500 psig (34.5 barg)
  • Gas/ambient temp: 32°F to 122°F (0°C to 50°C)
  • Response time: Governed by total volume of installation, contact Sierra for suggestions on optimized installation
  • Single-sided 24 VDC power supply
  • Seals: Viton®, Neoprene®, Kalrez®
  • 316 stainless steel construction
  • Analog/digital output signals: RS-232, RS-485 (Multi-drop), 0 to 20, 4 to 20 mA; 0 to 5, 1 to 5, 0 to 10 VDC
  • Digital communications: Foundation Fieldbus, Modbus RTU, and Profibus DP
  • CE approved 

MicroTrack 101 Specification Sheet Download

To view all the information on the FlatTrak 101 by Sierra Instruments you can download the data sheet here 


Flow Type: Gas Flow Meters